本文系统介绍面向纳米堆叠(Nanostack)技术的工艺设计套件(PDK),涵盖其核心组成:层堆叠定义、垂直结构设计规则、堆叠器件紧凑模型(如RRAM、纳米片晶体管)及参数化单元(PCells)。重点阐述PDK在对准精度、热预算、应力管理与刻蚀选择性等三维约束中的建模方法,并给出基于EDA工具的设计流程、评估标准及定制化构建路径,强调其在纳米级三维集成中的关键桥梁作用。
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